검색결과 : 8건
| No. | Article |
|---|---|
| 1 |
Aspect Ratio-Dependent Etching on Metal Etch - Modeling and Experiment Xie RJ, Kava JD, Siegel M Journal of Vacuum Science & Technology A, 14(3), 1067, 1996 |
| 2 |
Simulation and Experimental-Study of Reemission During Sputter-Deposition of Ti-W Films Rogers BR, Cale TS, Chang YK Journal of Vacuum Science & Technology A, 14(3), 1142, 1996 |
| 3 |
Flux Distributions and Deposition Profiles from Hexagonal Collimators During Sputter-Deposition Lin Z, Cale TS Journal of Vacuum Science & Technology A, 13(4), 2183, 1995 |
| 4 |
Simulation of Collimated Flux Distributions During Physical Vapor-Deposition Lin Z, Cale TS Thin Solid Films, 270(1-2), 627, 1995 |
| 5 |
Low-Knudsen-Number Transport and Deposition Liao H, Cale TS Journal of Vacuum Science & Technology A, 12(4), 1020, 1994 |
| 6 |
Compositional Variation in Sputtered Ti-W Films Due to Reemission Rogers BR, Tracy CJ, Cale TS Journal of Vacuum Science & Technology B, 12(5), 2980, 1994 |
| 7 |
Spatial Composition Variation in Sputtered Ti-W Films Rogers BR, Cale TS Thin Solid Films, 236(1-2), 334, 1993 |
| 8 |
3-Dimensional Simulation of an Isolation Trench Refill Process Liao H, Cale TS Thin Solid Films, 236(1-2), 352, 1993 |