검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Studies of ion bombardment in high density plasmas containing CF4 Olthoff JK, Wang YC Journal of Vacuum Science & Technology A, 17(4), 1552, 1999 |
| 2 |
Positive ion species in high-density discharges containing chlorine and boron-trichloride Woodworth JR, Nichols CA, Hamilton TW Journal of Vacuum Science & Technology A, 16(6), 3235, 1998 |