검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Study of deep silicon etching for micro-gyroscope fabrication Fu L, Miao JM, Li XX, Lin RM Applied Surface Science, 177(1-2), 78, 2001 |
| 2 |
Transport mechanisms of ions and neutrals in low-pressure, high-density plasma etching of high aspect ratio contact holes Nishikawa K, Ootera H, Tomohisa S, Oomori T Thin Solid Films, 374(2), 190, 2000 |
| 3 |
Dynamics of plasma-surface interactions and feature profile evolution during pulsed plasma etching Ono K, Tuda M Thin Solid Films, 374(2), 208, 2000 |