검색결과 : 1건
No. | Article |
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1 |
Localized germanium-on-insulator patterns on Si by novel etching scheme in CF4/O-2 plasma Murthy BR, Balasubramanian N, Balakumar S, Mukherjee-Roy M, Trigg A, Kumar R, Kwong DL Thin Solid Films, 504(1-2), 77, 2006 |
No. | Article |
---|---|
1 |
Localized germanium-on-insulator patterns on Si by novel etching scheme in CF4/O-2 plasma Murthy BR, Balasubramanian N, Balakumar S, Mukherjee-Roy M, Trigg A, Kumar R, Kwong DL Thin Solid Films, 504(1-2), 77, 2006 |