검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Low temperature boron doping into crystalline silicon by boron-containing species generated in Cat-CVD apparatus Ohta T, Koyama K, Ohdaira K, Matsumura H Thin Solid Films, 575, 92, 2015 |
| No. | Article |
|---|---|
| 1 |
Low temperature boron doping into crystalline silicon by boron-containing species generated in Cat-CVD apparatus Ohta T, Koyama K, Ohdaira K, Matsumura H Thin Solid Films, 575, 92, 2015 |