검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
C4F8 dissociation in an inductively coupled plasma Radtke MT, Coburn JW, Graves DB Journal of Vacuum Science & Technology A, 21(4), 1038, 2003 |
| No. | Article |
|---|---|
| 1 |
C4F8 dissociation in an inductively coupled plasma Radtke MT, Coburn JW, Graves DB Journal of Vacuum Science & Technology A, 21(4), 1038, 2003 |