검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Pulsed dc self-sustained magnetron sputtering Wiatrowski A, Posadowski WM, Radzimski ZJ Journal of Vacuum Science & Technology A, 26(5), 1277, 2008 |
| 2 |
Magnetron sputtering process control by medium-frequency power supply parameter Posadowski WM, Wiatrowski A, Dora J, Radzimski ZJ Thin Solid Films, 516(14), 4478, 2008 |
| 3 |
Directional copper deposition using dc magnetron self-sputtering Radzimski ZJ, Posadowski WM, Rossnagel SM, Shingubara S Journal of Vacuum Science & Technology B, 16(3), 1102, 1998 |
| 4 |
Optical-Emission Spectroscopy of High-Density Metal Plasma Formed During Magnetron Sputtering Radzimski ZJ, Hankins OE, Cuomo JJ, Posadowski WP, Shingubara S Journal of Vacuum Science & Technology B, 15(2), 202, 1997 |
| 5 |
Selectivity Variations of Electron-Beam Patterned Silicon Dioxide Films Kimball JF, Allen PE, Griffis DP, Radzimski ZJ, Russell PE Journal of Vacuum Science & Technology A, 12(4), 2457, 1994 |
| 6 |
Proximity Effects in Low-Energy Electron-Beam Lithography Stark TJ, Edenfeld KM, Griffis DP, Radzimski ZJ, Russell PE Journal of Vacuum Science & Technology B, 11(6), 2367, 1993 |