검색결과 : 2건
No. | Article |
---|---|
1 |
Effects of Nitrogen Trifluoride on the Properties of Plasma-Enhanced Chemical-Vapor-Deposited Semiinsulating Polysilicon Films Ranade RM, Ang SS, Brown WD Thin Solid Films, 258(1-2), 292, 1995 |
2 |
Reactive Ion Etching of Thin Gold-Films Ranade RM, Ang SS, Brown WD Journal of the Electrochemical Society, 140(12), 3676, 1993 |