검색결과 : 45건
| No. | Article |
|---|---|
| 1 |
Micromachined scanning proximal probes with integrated piezoresistive readout and bimetal actuator for high eigenmode operation Woszczyna M, Zawierucha P, Paletko P, Zielony M, Gotszalk T, Sarov Y, Ivanov T, Frank A, Zollner JP, Rangelow IW Journal of Vacuum Science & Technology B, 28(6), C6N12, 2010 |
| 2 |
Parallel proximal probe arrays with vertical interconnections Sarov Y, Frank A, Ivanov T, Zollner JP, Ivanova K, Volland B, Rangelow IW, Brogan A, Wilson R, Zawierucha P, Zielony M, Gotszalk T, Nikolov N, Zier M, Schmidt B, Kostic I Journal of Vacuum Science & Technology B, 27(6), 3132, 2009 |
| 3 |
Scanning proximal probes for parallel imaging and lithography Ivanova K, Sarov Y, Ivanov T, Frank A, Zollner J, Bitterlich C, Wenzel U, Volland BE, Klett S, Rangelow IW, Zawierucha P, Zielony M, Gotszalk T, Dontzov D, Schott W, Nikolov N, Zier M, Schmidt B, Engl W, Sulzbach T, Kostic I Journal of Vacuum Science & Technology B, 26(6), 2367, 2008 |
| 4 |
Single atom doping for quantum device development in diamond and silicon Weis CD, Schuh A, Batra A, Persaud A, Rangelow IW, Bokor J, Lo CC, Cabrini S, Sideras-Haddad E, Fuchs GD, Hanson R, Awschalom DD, Schenkel T Journal of Vacuum Science & Technology B, 26(6), 2596, 2008 |
| 5 |
Micromachined piezoresistive proximal probe with integrated bimorph actuator for aligned single ion implantation Persaud A, Ivanova K, Sarov Y, Ivanov T, Volland BE, Rangelow IW, Nikolov N, Schenkel T, Djakov V, Jenkins DWK, Meijer J, Vogel T Journal of Vacuum Science & Technology B, 24(6), 3148, 2006 |
| 6 |
Profile evolution of Cr masked features undergoing HBr-inductively coupled plasma etching for use in 25 nm silicon nanoimprint templates Olynick DL, Liddle JA, Rangelow IW Journal of Vacuum Science & Technology B, 23(5), 2073, 2005 |
| 7 |
Ion implantation with scanning probe alignment Persaud A, Liddle JA, Schenkel T, Bokor J, Ivanov T, Rangelow IW Journal of Vacuum Science & Technology B, 23(6), 2798, 2005 |
| 8 |
Micromachined Arch-type cantilever as high sensitivity uncooled infrared detector Ivanova K, Ivanov T, Rangelow IW Journal of Vacuum Science & Technology B, 23(6), 3153, 2005 |
| 9 |
Batch fabricated scanning near field optical microscope/atomic force microscopy microprobe integrated with piezoresistive cantilever beam with highly reproducible focused ion beam micromachined aperture Grabiec P, Radojewski J, Zaborowski M, Domanski K, Schenkel T, Rangelow IW Journal of Vacuum Science & Technology B, 22(1), 16, 2004 |
| 10 |
High-energy ion projection for deep ion implantation as a low cost high throughput alternative for subsequent epitaxy processes Meijer J, Burchard B, Ivanova K, Volland BE, Rangelow IW, Rub M, Deboy G Journal of Vacuum Science & Technology B, 22(1), 152, 2004 |