검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Rapid synthesis of tantalum oxide dielectric films by microwave microwave-assisted atmospheric chemical vapor deposition Ndiege N, Subramanian V, Shannon MA, Masel RI Thin Solid Films, 516(23), 8307, 2008 |
| No. | Article |
|---|---|
| 1 |
Rapid synthesis of tantalum oxide dielectric films by microwave microwave-assisted atmospheric chemical vapor deposition Ndiege N, Subramanian V, Shannon MA, Masel RI Thin Solid Films, 516(23), 8307, 2008 |