검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Integration of block copolymer directed assembly with 193 immersion lithography Liu CC, Nealey PF, Raub AK, Hakeem PJ, Brueck SRJ, Han E, Gopalan P Journal of Vacuum Science & Technology B, 28(6), C6B30, 2010 |
| 2 |
Large area three-dimensional photonic crystals with embedded waveguides Raub AK, Brueck SRJ Journal of Vacuum Science & Technology B, 28(6), C6O38, 2010 |
| 3 |
Fabrication of 22 nm half-pitch silicon lines by single-exposure self-aligned spatial-frequency doubling Raub AK, Li D, Frauenglass A, Brueck SRJ Journal of Vacuum Science & Technology B, 25(6), 2224, 2007 |
| 4 |
Imaging capabilities of resist in deep ultraviolet liquid immersion interferometric lithography Raub AK, Frauenglass A, Brueck SRJ, Conley W, Dammel R, Romano A, Sato M, Hinsberg W Journal of Vacuum Science & Technology B, 22(6), 3459, 2004 |