검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
The deposition of amorphous carbon thin films for hard mask applications by reactive particle beam assisted sputtering process Lee T, Min NK, Lee HW, Jang J, Lee D, Hong M, Kwon KH Thin Solid Films, 517(14), 3999, 2009 |
| No. | Article |
|---|---|
| 1 |
The deposition of amorphous carbon thin films for hard mask applications by reactive particle beam assisted sputtering process Lee T, Min NK, Lee HW, Jang J, Lee D, Hong M, Kwon KH Thin Solid Films, 517(14), 3999, 2009 |