검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Properties of amorphous silicon thin films synthesized by reactive particle beam assisted chemical vapor deposition Choi SG, Wang SJ, Park HH, Jang JN, Hong MP, Kwon KH, Park HH Thin Solid Films, 518(24), 7372, 2010 |
| 2 |
The deposition of amorphous carbon thin films for hard mask applications by reactive particle beam assisted sputtering process Lee T, Min NK, Lee HW, Jang J, Lee D, Hong M, Kwon KH Thin Solid Films, 517(14), 3999, 2009 |