검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Characterisation of ultra-shallow disorder profiles and dielectric functions in ion implanted Si Mohacsi I, Petrik P, Fried M, Lohner T, van den Berg JA, Reading MA, Giubertoni D, Barozzi M, Parisini A Thin Solid Films, 519(9), 2847, 2011 |
| 2 |
High resolution medium energy ion scattering analysis for the quantitative depth profiling of ultrathin high-k layers Reading MA, van den Berg JA, Zalm PC, Armour DG, Bailey P, Noakes TCQ, Parisini A, Conard T, De Gendt S Journal of Vacuum Science & Technology B, 28(1), C1C65, 2010 |