검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Infrared Study of Process Emissions During C3F8/O-2 Plasma Cleaning of Plasma-Enhanced Chemical-Vapor-Deposition Chambers Zazzera L, Reagen W, Cheng A Journal of the Electrochemical Society, 144(10), 3597, 1997 |
| No. | Article |
|---|---|
| 1 |
Infrared Study of Process Emissions During C3F8/O-2 Plasma Cleaning of Plasma-Enhanced Chemical-Vapor-Deposition Chambers Zazzera L, Reagen W, Cheng A Journal of the Electrochemical Society, 144(10), 3597, 1997 |