검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
SiOxNy thin films deposited by reactive sputtering: Process study and structural characterisation Rebib F, Tomasella E, Dubois M, Cellier J, Sauvage T, Jacquet M Thin Solid Films, 515(7-8), 3480, 2007 |
| 2 |
Electrical behaviour of SiOxNy thin films and correlation with structural defects Rebib F, Tomasella E, Aida S, Dubois M, Cellier J, Jacquet M Applied Surface Science, 252(15), 5607, 2006 |
| 3 |
Optical emission spectroscopy investigation of sputtering discharge used for SiOxNy thin films deposition and correlation with the film composition Rebib F, Tomasella E, Thomas L, Cellier J, Sauvage T, Jacquet M Applied Surface Science, 252(15), 5611, 2006 |