검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Structural and compositional studies of a-Si,C : H thin films obtained excimer lamp chemical vapor deposition from acetylene and silane Redondas X, Gonzalez P, Leon B, Perez-Amor M, Soares JC, da Silva MD Journal of Vacuum Science & Technology A, 16(2), 660, 1998 |
| 2 |
Influence of the substrate temperature on silicon-carbon thin films deposited from SiH4 and C2H4 by excimer lamp-CVD Redondas X, Gonzalez P, Leon B, Perez-Amor M Thin Solid Films, 317(1-2), 112, 1998 |