검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Stability of HSQ nanolines defined by e-beam lithography for Si nanowire field effect transistors Regonda S, Aryal M, Hu WC Journal of Vacuum Science & Technology B, 26(6), 2247, 2008 |
| 2 |
Characterizing nanoimprint profile shape and polymer flow behavior using visible light angular scatterometry Al-Assaad RM, Regonda S, Tao L, Pang SW, Hu WW Journal of Vacuum Science & Technology B, 25(6), 2396, 2007 |