화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 4H-SiC layers grown by liquid phase epitaxy on 4H-SiC off-axis substrates
Kuznetsov N, Morozov A, Bauman D, Ivantsov V, Sukhoveev V, Nikitina I, Zubrilov A, Rendakova S, Dimitriev VA, Hofman D, Masri P
Materials Science Forum, 338-3, 229, 2000
2 Micropipe healing in liquid phase epitaxial growth of SiC
Yakimova R, Syvajarvi M, Rendakova S, Dimitriev VA, Henry A, Janzen E
Materials Science Forum, 338-3, 237, 2000
3 4H-SiC CVD epitaxial layers with improved structural quality grown on SiC wafers with reduced micropipe density
Kalinina EV, Zubrilov A, Solov'ev V, Kuznetsov NI, Hallen A, Konstantinov A, Karlsson S, Rendakova S, Dmitriev V
Materials Science Forum, 338-3, 505, 2000