검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
High removal rate of cross-linked SU-8 resist using hydrogen radicals generated by tungsten hot-wire catalyzer Kono A, Arai Y, Maruoka T, Yamamoto M, Goto Y, Takahashi S, Nishiyama T, Horibe H Thin Solid Films, 562, 632, 2014 |
| 2 |
Study of Chemical Structure and Removal of Positive-Tone Novolak Resist Having Various Prebake Temperature using Wet Ozone Angata Y, Goto Y, Takahashi S, Kono A, Koike K, Nishiyama I, Kamoto R, Horibe H KAGAKU KOGAKU RONBUNSHU, 39(2), 144, 2013 |
| 3 |
Ion-implanted resist removal using atomic hydrogen Horibe H, Yamamoto M, Maruoka T, Goto Y, Kono A, Nishiyama I, Tagawa S Thin Solid Films, 519(14), 4578, 2011 |
| 4 |
Removal of Negative-tone Novolak Chemical Amplification Resist by Chemicals Kono A, Yada K, Horibe H, Ota H, Yanagi M KAGAKU KOGAKU RONBUNSHU, 36(6), 589, 2010 |