검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Predicting critical dimension uniformity in advanced electron-beam projection lithography masks Cotte EP, Mikkelson AR, Matesanz O, Engelstad RL, Lovell EG, Reu PL Journal of Vacuum Science & Technology B, 21(6), 3027, 2003 |
| 2 |
Electron projection lithography mask format layer stress measurement and simulation of pattern transfer distortion Reu PL, Chen CF, Engelstad RL, Lovell EG, Bayer T, Greschner J, Kalt S, Weiss H, Wood OR, Mackay RS Journal of Vacuum Science & Technology B, 20(6), 3053, 2002 |
| 3 |
Simulating the effects of pattern density gradients on electron-beam projection lithography pattern transfer distortions Reu PL, Engelstad RL, Lovell EG, Magg CK, Lercel MJ, Mackay RS Journal of Vacuum Science & Technology B, 19(6), 2652, 2001 |