검색결과 : 1건
No. | Article |
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1 |
CO2 promotes penetration and removal of aqueous hydrocarbon surfactant cleaning solutions and silylation in low-k dielectrics with 3 nm pores Keagy JA, Li Y, Green PF, Johnston KP, Weber F, Rhoad JT, Busch EL, Wolf PJ Journal of Supercritical Fluids, 42(3), 398, 2007 |