검색결과 : 2건
No. | Article |
---|---|
1 |
Quarter-micron chemically amplified reaction image determination using arrested development Rhyner SJ, Taylor JW Journal of Vacuum Science & Technology B, 15(6), 2627, 1997 |
2 |
Resist Application Effects on Chemically Amplified Resist Response Dentinger PM, Nelson CM, Rhyner SJ, Taylor JW, Fedynyshyn TH, Cronin MF Journal of Vacuum Science & Technology B, 14(6), 4239, 1996 |