검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Nucleation and film growth during copper chemical vapor deposition using the precursor Cu(TMVS)(hfac) Yang D, Hong J, Richards DF, Cale TS Journal of Vacuum Science & Technology B, 20(2), 495, 2002 |
| 2 |
Extension velocities for level set based surface profile evolution Richards DF, Bloomfield MO, Sen S, Cale TS Journal of Vacuum Science & Technology A, 19(4), 1630, 2001 |