화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Secondary ion mass spectrometry backside analysis of barrier layers for copper diffusion
Gu C, Pivovarov A, Garcia R, Stevie F, Griffis D, Moran J, Kulig L, Richards JF
Journal of Vacuum Science & Technology B, 22(1), 350, 2004
2 Carrier profiling via scanning tunneling spectroscopy: Comparison with scanning capacitance microscopy
Liu FY, Griffin PB, Plummer JD, Lyding JW, Moran JM, Richards JF, Kulig L
Journal of Vacuum Science & Technology B, 22(1), 422, 2004