검색결과 : 12건
| No. | Article |
|---|---|
| 1 |
Redistribution and activation of implanted S, Se, Te, Be, Mg, and C in GaN Wilson RG, Zavada JM, Cao XA, Singh RK, Pearton SJ, Guo HJ, Pennycock SJ, Fu M, Sekhar JA, Scarvepalli V, Shu RJ, Han J, Rieger DJ, Zolper JC, Abernathy CR Journal of Vacuum Science & Technology A, 17(4), 1226, 1999 |
| 2 |
High-Density Plasma-Etching of Compound Semiconductors Shul RJ, Mcclellan GB, Briggs RD, Rieger DJ, Pearton SJ, Abernathy CR, Lee JW, Constantine C, Barratt C Journal of Vacuum Science & Technology A, 15(3), 633, 1997 |
| 3 |
High-Rate Reactive Ion Etch and Electron-Cyclotron-Resonance Etching of GaAs via Holes Using Thick Polyimide and Photoresist Masks Shul RJ, Lovejoy ML, Word JC, Howard AJ, Rieger DJ, Kravitz SH Journal of Vacuum Science & Technology B, 15(3), 657, 1997 |
| 4 |
Adhesion Studies of GaAs-Based Ohmic Contact and Bond Pad Metallization Seigal PK, Briggs RD, Rieger DJ, Baca AG, Howard AJ Thin Solid Films, 290-291, 503, 1996 |
| 5 |
Thin-Film Tantalum Nitride Resistor Technology for Phosphide-Based Optoelectronics Lovejoy ML, Patrizi GA, Rieger DJ, Barbour JC Thin Solid Films, 290-291, 513, 1996 |
| 6 |
Low-Resistivity Ohmic Contacts to Moderately Doped N-GaAs with Low-Temperature Processing Lovejoy ML, Howard AJ, Zavadil KR, Rieger DJ, Shul RJ, Barnes PA Journal of Vacuum Science & Technology A, 13(3), 758, 1995 |
| 7 |
Plasma-Induced Damage of GaAs During Etching of Refractory-Metal Contacts Shul RJ, Lovejoy ML, Baca AG, Zolper JC, Rieger DJ, Hafich MJ, Corless RF, Vartuli CB Journal of Vacuum Science & Technology A, 13(3), 912, 1995 |
| 8 |
Plasma-Induced Damage of GaAs PN-Junction Diodes Using Electron-Cyclotron-Resonance Generated Cl-2/Ar, BCl3/Ar, Cl-2/BCl3/Ar, and Sicl4/Ar Plasmas Shul RJ, Lovejoy ML, Hetherington DL, Rieger DJ, Klem JF, Melloch MR Journal of Vacuum Science & Technology B, 13(1), 27, 1995 |
| 9 |
Smooth Reactive Ion Etching of GaAs Using a Hydrogen Plasma Pretreatment Choquette KD, Shul RJ, Howard AJ, Rieger DJ, Freund RS, Wetzel RC Journal of Vacuum Science & Technology B, 13(1), 40, 1995 |
| 10 |
New Methods for Circuit Fabrication on Poly(Tetrafluoroethylene) Substrates Howard AJ, Rye RR, Ricco AJ, Rieger DJ, Lovejoy ML, Sloan LR, Mitchell MA Journal of the Electrochemical Society, 141(12), 3556, 1994 |