검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Novel Single Mirror Condenser for X-Ray-Lithography Beam Lines Xiao JB, Cerrina F, Rippstein RP Journal of Vacuum Science & Technology B, 12(6), 4018, 1994 |
| 2 |
Performance of a Wide-Field Flux Delivery System for Synchrotron X-Ray-Lithography Silverman JP, Archie CN, Oberschmidt JM, Rippstein RP Journal of Vacuum Science & Technology B, 11(6), 2976, 1993 |