검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Nanofabrication of high aspect ratio 24 nm x-ray zone plates for x-ray imaging applications Feng Y, Feser M, Lyon A, Rishton S, Zeng XH, Chen S, Sassolini S, Yun WB Journal of Vacuum Science & Technology B, 25(6), 2004, 2007 |
| 2 |
Implementation of real-time proximity effect correction in a raster shaped beam tool Boegli V, Johnson L, Kao H, Veneklasen L, Hofmann U, Finkelstein I, Stovall S, Rishton S Journal of Vacuum Science & Technology B, 18(6), 3138, 2000 |
| 3 |
Spatial-Phase-Locked Electron-Beam Lithography and X-Ray-Lithography Fabricating First-Order Gratings on Rib Wave-Guides Wong VV, Ferrera J, Damask JN, Carter JM, Moon EE, Haus HA, Smith HI, Rishton S Journal of Vacuum Science & Technology B, 12(6), 3741, 1994 |
| 4 |
Spatial-Phase-Locked Electron-Beam Lithography - Initial Test-Results Ferrera J, Wong VV, Rishton S, Boegli V, Anderson EH, Kern DP, Smith HI Journal of Vacuum Science & Technology B, 11(6), 2342, 1993 |