검색결과 : 15건
| No. | Article |
|---|---|
| 1 |
Tunable distributed-feedback laser gratings for telecom applications, manufactured by electron-beam lithography Rishton SA, Pezeshki B, Zou S, Yoffe G, Henschel W Journal of Vacuum Science & Technology B, 20(6), 2749, 2002 |
| 2 |
High-throughput electron-beam lithography with a raster-scanned, variably shaped beam Veneklasen LH, Kao HM, Rishton SA, Winter S, Boegli V, Newman T, Bertuccelli G, Howard G, Le P, Tan Z, Lozes R Journal of Vacuum Science & Technology B, 19(6), 2455, 2001 |
| 3 |
Raster shaped beam pattern generation Rishton SA, Varner JK, Veneklasen LH, Boegli V, Sagle AL, Hofmann U, Kao H, Wang W Journal of Vacuum Science & Technology B, 17(6), 2927, 1999 |
| 4 |
Atomic-Force Microscope-Based Data-Storage Using Replicated Media Terris BD, Rishton SA, Mamin HJ, Best ME, Logan JA, Rugar D Journal of Vacuum Science & Technology B, 15(4), 1584, 1997 |
| 5 |
New complimentary metal-oxide semiconductor technology with self-aligned Schottky source/drain and low-resistance T gates Rishton SA, Ismail K, Chu JO, Chan KK, Lee KY Journal of Vacuum Science & Technology B, 15(6), 2795, 1997 |
| 6 |
Electron-Beam Microcolumns for Lithography and Related Applications Chang TH, Thomson MG, Kratschmer E, Kim HS, Yu ML, Lee KY, Rishton SA, Hussey BW, Zolgharnain S Journal of Vacuum Science & Technology B, 14(6), 3774, 1996 |
| 7 |
Experimental Evaluation of a 20X20 mm Footprint Microcolumn Kratschmer E, Kim HS, Thomson MG, Lee KY, Rishton SA, Yu ML, Zolgharnain S, Hussey BW, Chang TH Journal of Vacuum Science & Technology B, 14(6), 3792, 1996 |
| 8 |
An Electron-Beam Microcolumn with Improved Resolution, Beam Current, and Stability Kratschmer E, Kim HS, Thomson MG, Lee KY, Rishton SA, Yu ML, Chang TH Journal of Vacuum Science & Technology B, 13(6), 2498, 1995 |
| 9 |
Characterization of a GaAs Metal-Semiconductor-Metal Low-Energy-Electron Detector Zolgharnain S, Lee KY, Rishton SA, Kisker D, Chang TH Journal of Vacuum Science & Technology B, 13(6), 2556, 1995 |
| 10 |
Micromachining Applications of a High-Resolution Ultrathick Photoresist Lee KY, Labianca N, Rishton SA, Zolgharnain S, Gelorme JD, Shaw J, Chang TH Journal of Vacuum Science & Technology B, 13(6), 3012, 1995 |