검색결과 : 5건
No. | Article |
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1 |
Wetting and dissolution studies of fluoropolymers used in 157 nm photolithography applications Markley TJ, Marsella JA, Robertson EA, Parris GE, Zarkov Z, Jakubek V, Ober CK Journal of Vacuum Science & Technology B, 22(1), 140, 2004 |
2 |
Vapor pressure and viscosity of 1,1,1,5,5,5-hexafluoro-2,4-pentanedione George MA, Young KM, Robertson EA, Beck SE, Voloshin G Journal of Chemical and Engineering Data, 43(1), 60, 1998 |
3 |
Reaction-Kinetics of Photoactive Defects in Semiconductor Dissolution Robertson EA, Fogler HS AIChE Journal, 42(8), 2279, 1996 |
4 |
Model for the Reaction-Rate-Limited Dissolution of Solids with Etch-Rate Heterogeneities Robertson EA, Fogler HS AIChE Journal, 42(9), 2654, 1996 |
5 |
Laser-Enhanced Material Selectivity in N-GaAs/N-Al0.4Ga0.6As Heterostructures Robertson EA, Fogler HS Journal of the Electrochemical Society, 141(10), 2893, 1994 |