화학공학소재연구정보센터
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No. Article
1 Wetting and dissolution studies of fluoropolymers used in 157 nm photolithography applications
Markley TJ, Marsella JA, Robertson EA, Parris GE, Zarkov Z, Jakubek V, Ober CK
Journal of Vacuum Science & Technology B, 22(1), 140, 2004
2 Vapor pressure and viscosity of 1,1,1,5,5,5-hexafluoro-2,4-pentanedione
George MA, Young KM, Robertson EA, Beck SE, Voloshin G
Journal of Chemical and Engineering Data, 43(1), 60, 1998
3 Reaction-Kinetics of Photoactive Defects in Semiconductor Dissolution
Robertson EA, Fogler HS
AIChE Journal, 42(8), 2279, 1996
4 Model for the Reaction-Rate-Limited Dissolution of Solids with Etch-Rate Heterogeneities
Robertson EA, Fogler HS
AIChE Journal, 42(9), 2654, 1996
5 Laser-Enhanced Material Selectivity in N-GaAs/N-Al0.4Ga0.6As Heterostructures
Robertson EA, Fogler HS
Journal of the Electrochemical Society, 141(10), 2893, 1994