검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Fullerene resist materials for the 32nm node and beyond Gibbons FP, Robinson APG, Palmer RE, Diegoli S, Manickam M, Preece JA Advanced Functional Materials, 18(13), 1977, 2008 |
| 2 |
Chemical amplification of a triphenylene molecular electron beam resist Zaid HM, Robinson APG, Palmer RE, Manickam M, Preece JA Advanced Functional Materials, 17(14), 2522, 2007 |
| 3 |
Polysubstituted derivatives of triphenylene as high resolution electron beam resists for nanolithography Robinson APG, Palmer RE, Tada T, Kanayama T, Allen MT, Preece JA, Harris KDM Journal of Vacuum Science & Technology B, 18(6), 2730, 2000 |