검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Comparative measurements on atomic layer deposited Al2O3 thin films using ex situ table top and mapping ellipsometry, as well as X-ray and VUV reflectometry Petrik P, Gumprecht T, Nutsch A, Roeder G, Lemberger M, Juhasz G, Polgar O, Major C, Kozma P, Janosov M, Fodor B, Agocs E, Fried M Thin Solid Films, 541, 131, 2013 |
| 2 |
Determination of the Dill parameters of thick positive resist for use in modeling applications Roeder G, Liu S, Aygun G, Evanschitzky P, Erdmann A, Schellenberger M, Pfitzner L Thin Solid Films, 519(9), 2978, 2011 |
| 3 |
An X-ray photoelectron spectroscopy study of ultra-thin oxynitride films Ladas S, Sygellou L, Kennou S, Wolf M, Roeder G, Nutsch A, Rambach M, Lerch W Thin Solid Films, 520(2), 871, 2011 |