검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Remote Plasma ALD of SrTiO3 Using Cyclopentadienlyl-Based Ti and Sr Precursors Langereis E, Roijmans R, Roozeboom F, van de Sanden MCM, Kessels WMM Journal of the Electrochemical Society, 158(2), G34, 2011 |
| No. | Article |
|---|---|
| 1 |
Remote Plasma ALD of SrTiO3 Using Cyclopentadienlyl-Based Ti and Sr Precursors Langereis E, Roijmans R, Roozeboom F, van de Sanden MCM, Kessels WMM Journal of the Electrochemical Society, 158(2), G34, 2011 |