검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Repair of Phase-Shifting Mask Defects Using a Novel Planarization Technique with Conventional Blanks Pierrat C, Demarco J, Vella RM, Vaidya S, Rolfson B, Johnson JC Journal of Vacuum Science & Technology B, 12(5), 3057, 1994 |