검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
High-density plasma patterning of low dielectric constant polymers: A comparison between polytetrafluoroethylene, parylene-N, and poly(arylene ether) Standaert TEFM, Matsuo PJ, Li X, Oehrlein GS, Lu TM, Gutmann R, Rosenmayer CT, Bartz JW, Langan JG, Entley WR Journal of Vacuum Science & Technology A, 19(2), 435, 2001 |