검색결과 : 30건
| No. | Article |
|---|---|
| 1 |
Deposition of aluminum-doped zinc oxide thin films for optical applications using rf and dc magnetron sputter deposition Sivakumar K, Rossnagel SM Journal of Vacuum Science & Technology A, 28(4), 515, 2010 |
| 2 |
Electrochemical Characterization of Thin Film Electrodes Toward Developing a DNA Transistor Harrer S, Ahmed S, Afzali-Ardakani A, Luan BQ, Waggoner PS, Shao XY, Peng HB, Goldfarb DL, Martyna GJ, Rossnagel SM, Deligianni L, Stolovitzky GA Langmuir, 26(24), 19191, 2010 |
| 3 |
Alteration of Cu conductivity in the size effect regime Rossnagel SM, Kuan TS Journal of Vacuum Science & Technology B, 22(1), 240, 2004 |
| 4 |
Thin film deposition with physical vapor deposition and related technologies Rossnagel SM Journal of Vacuum Science & Technology A, 21(5S), S74, 2003 |
| 5 |
Diffusion barrier properties of very thin TAN with high nitrogen concentration Rossnagel SM, Kim H Journal of Vacuum Science & Technology B, 21(6), 2550, 2003 |
| 6 |
Plasma-enhanced atomic layer deposition of tantalum thin films: the growth and film properties Kim H, Rossnagel SM Thin Solid Films, 441(1-2), 311, 2003 |
| 7 |
Growth kinetics and initial stage growth during plasma-enhanced Ti atomic layer deposition Kim H, Rossnagel SM Journal of Vacuum Science & Technology A, 20(3), 802, 2002 |
| 8 |
Time development of microstructure and resistivity for very thin Cu films Rossnagel SM, Kuan TS Journal of Vacuum Science & Technology A, 20(6), 1911, 2002 |
| 9 |
Diffusion barrier properties of transition metal thin films grown by plasma-enhanced atomic-layer deposition Kim H, Cabral C, Lavoie C, Rossnagel SM Journal of Vacuum Science & Technology B, 20(4), 1321, 2002 |
| 10 |
Phase transformation of thin sputter-deposited tungsten films at room temperature Rossnagel SM, Noyan IC, Cabral C Journal of Vacuum Science & Technology B, 20(5), 2047, 2002 |