화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Formation of a Crystalline Metal-Rich Silicide in Thin-Film Titanium/Silicon Reactions
Clevenger LA, Cabral C, Roy RA, Lavoie C, Jordansweet J, Brauer S, Morales G, Ludwig KF, Stephenson GB
Thin Solid Films, 289(1-2), 220, 1996
2 Lithography and Fabrication Processes for Sub-100 nm Scale Complementary Metal-Oxide-Semiconductor
Wind SJ, Taur Y, Lee YH, Mii Y, Viswanathan RG, Bucchignano JJ, Pomerene AT, Sicina RM, Milkove KR, Stiebritz JW, Roy RA, Hu CK, Manny MP, Cohen S, Chen W
Journal of Vacuum Science & Technology B, 13(6), 2688, 1995
3 Model of Lead Loss in Pb(Mgxnb1-X)Oz Ion-Beam Sputtered Thin-Films
Pignolet A, Roy RA, Doyle JP, Cuomo JJ
Journal of Vacuum Science & Technology A, 12(5), 2840, 1994
4 Sonoluminescence
Crum LA, Roy RA
Science, 266(5183), 233, 1994