검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Ferroelectric properties of SOS and SOI pseudo-MOSFETs with HfO2 interlayers Popov VP, Antonov VA, Ilnitsky MA, Tyschenko IE, Vdovin VI, Miakonkikh AV, Rudenko KV Solid-State Electronics, 159, 63, 2019 |
| 2 |
Analytical comparison of atomic layer deposition of oxide films inside trench and hole nanostructures Fadeev AV, Rudenko KV Thin Solid Films, 672, 83, 2019 |
| 3 |
Microstructure and electrical properties of thin HfO2 deposited by plasma-enhanced atomic layer deposition Chesnokov YM, Miakonkikh AV, Rogozhin AE, Rudenko KV, Vasiliev AL Journal of Materials Science, 53(10), 7214, 2018 |