검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Effect of the dielectric-substrate interface on charge accumulation from vacuum ultraviolet irradiation of low-k porous organosilicate dielectrics Sinha H, Sehgal A, Ren H, Nichols MT, Tomoyasu M, Russell NM, Nishi Y, Shohet JL Thin Solid Films, 519(16), 5464, 2011 |
| 2 |
Integrated CVD-PVD Al plug processing for sub-half micron features Konecni A, Dixit G, Russell NM, Luttmer JD, Havemann RH Thin Solid Films, 320(1), 52, 1998 |
| 3 |
Adsorption and Decomposition of Diethylsilane and Diethylgermane on Si(100) - Surface-Reactions for an Atomic Layer Epitaxial Approach to Column-IV Epitaxy Kellerman BK, Mahajan A, Russell NM, Ekerdt JG, Banerjee SK, Tasch AF, Campion A, White JM, Bonser DJ Journal of Vacuum Science & Technology A, 13(4), 1819, 1995 |
| 4 |
Surface-Chemistry of Diethylsilane and Diethylgermane on Si(100) - An Atomic Layer Epitaxy Approach Mahajan A, Kellerman BK, Russell NM, Banerjee S, Campion A, Ekerdt JG, Tasch A, White JM, Bonser DJ Journal of Vacuum Science & Technology A, 12(4), 2265, 1994 |