검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Alignment with exposed resist in photolithography Burm J, Tate A, Kopf RF, Ryan RW, Hamm RA, Chirovsky LM Journal of Vacuum Science & Technology B, 17(3), 905, 1999 |
| 2 |
Side-by-side wafer bonding of InP for use with stepper-based lithography Ryan RW, Kopf RF, Tate A, Burm J, Hamm RA Journal of Vacuum Science & Technology B, 16(4), 2110, 1998 |
| 3 |
Dielectric-assisted trilayer lift-off process for improved metal definition Ryan RW, Kopf RF, Hamm RA, Malik RJ, Masaitis R, Opila R Journal of Vacuum Science & Technology B, 16(5), 2759, 1998 |