검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Effects of substrate temperature on properties of pulsed dc reactively sputtered tantalum oxide films Jain P, Juneja JS, Bhagwat V, Rymaszewski EJ, Lu TM, Cale TS Journal of Vacuum Science & Technology A, 23(3), 512, 2005 |
| 2 |
Frequency-dependent pulsed direct current magnetron sputtering of titanium oxide films Kim JY, Barnat E, Rymaszewski EJ, Lu TM Journal of Vacuum Science & Technology A, 19(2), 429, 2001 |
| 3 |
Discrete beta-Ta2O5 crystallite formation in reactively sputtered amorphous thin films Beckage PJ, Knorr DB, Wu XM, Lu TM, Rymaszewski EJ Journal of Materials Science, 33(17), 4375, 1998 |