검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Chemical-mechanical photoresist drying in supercritical carbon dioxide with hydrocarbon surfactants Zhang XG, Pham JQ, Ryza N, Green PF, Johnston KP Journal of Vacuum Science & Technology B, 22(2), 818, 2004 |
| No. | Article |
|---|---|
| 1 |
Chemical-mechanical photoresist drying in supercritical carbon dioxide with hydrocarbon surfactants Zhang XG, Pham JQ, Ryza N, Green PF, Johnston KP Journal of Vacuum Science & Technology B, 22(2), 818, 2004 |