검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Elimination of surface scratch/texture on the surface of single crystal Si substrate in chemo-mechanical grinding (CMG) process Tian YB, Zhou L, Shimizu J, Tashiro Y, Kang RK Applied Surface Science, 255(7), 4205, 2009 |
| No. | Article |
|---|---|
| 1 |
Elimination of surface scratch/texture on the surface of single crystal Si substrate in chemo-mechanical grinding (CMG) process Tian YB, Zhou L, Shimizu J, Tashiro Y, Kang RK Applied Surface Science, 255(7), 4205, 2009 |