화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Gate electrode effects on low-frequency (1/f) noise in p-MOSFETs with high-kappa dielectrics
Srinivasan P, Simoen E, Singanamalla R, Yu HY, Claeys C, Misra D
Solid-State Electronics, 50(6), 992, 2006
2 Highly conducting doped poly-Si deposited by hot wire CVD and its applicability as gate material for CMOS devices
Patil SB, Vairagar AV, Kumbhar AA, Sahu LK, Rao VR, Venkatramani N, Dusane RO, Schroeder B
Thin Solid Films, 430(1-2), 63, 2003
3 Boron diffusion in silicon oxides and oxynitrides
Ellis KA, Buhrman RA
Journal of the Electrochemical Society, 145(6), 2068, 1998
4 The Influence of Fluorine on Boron-Enhanced Diffusion in Silicon by Bf2+ Implantation Through Oxide During High-Temperature Rapid Thermal Anneal
Wang LZ, Luo MS, Tseng HH, Ajuria SA
Journal of the Electrochemical Society, 144(11), L298, 1997