검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Impact of iron contamination and roughness generated in ammonia hydrogen peroxide mixtures (SC1) on 5 nm gate oxides De Gendt S, Knotter DM, Kenis K, Mertens PW, Heyns MM Journal of the Electrochemical Society, 145(7), 2589, 1998 |
| 2 |
Electrochemical Investigation of Copper Contamination on Silicon-Wafers from HF Solutions Jeon JS, Raghavan S, Parks HG, Lowell JK, Ali I Journal of the Electrochemical Society, 143(9), 2870, 1996 |