화학공학소재연구정보센터
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No. Article
1 Lateral solid phase epitaxy of amorphously grown Si1-xGex layers on SiO2/Si(100) substrates using in-situ RPCVD postannealing
Skibitzki O, Yamamoto Y, Schubert MA, Tillack B
Thin Solid Films, 593, 91, 2015
2 Solid-phase epitaxy of undoped amorphous silicon by in-situ postannealing
Skibitzki O, Yamamoto Y, Schubert MA, Tillack B
Thin Solid Films, 520(8), 3271, 2012
3 Solid-phase epitaxy of amorphous silicon films by in situ postannealing using RPCVD
Skibitzki O, Yamamoto Y, Schubert MA, Weidner G, Tillack B
Solid-State Electronics, 60(1), 13, 2011
4 Fabrication of high-Ge-fraction strained Si1-xGex/Si hole resonant tunneling diode using low-temperature Si2H6 reaction for nanometer-order ultrathin Si barriers
Takahashi K, Sakuraba M, Murota J
Solid-State Electronics, 60(1), 112, 2011
5 Improvement in photovoltaic conversion efficiency of InGaP solar cells grown on Si substrate by thermal cleaning using Si2H6
Goto S, Ueda T, Yamagishi C
Solar Energy Materials and Solar Cells, 66(1-4), 631, 2001
6 Dissociative adsorption of silane on the Si(100)-(2x1) surface
Brown AR, Doren DJ
Journal of Chemical Physics, 110(5), 2643, 1999
7 Ge(001): B gas-source molecular beam epitaxy: B surface segregation, hydrogen desorption, and film growth kinetics
Kim H, Greene JE
Journal of Vacuum Science & Technology A, 17(2), 354, 1999
8 Absorption spectroscopy of SiH2 near 640 nm
Escribano R, Campargue A
Journal of Chemical Physics, 108(15), 6249, 1998
9 Photoinduced reaction of disilane with the Si(111) surface
Batinica GJ, Crowell JE
Journal of Physical Chemistry B, 102(21), 4135, 1998
10 Epitaxial growth of 3C-SiC on Si(100) by pulsed supersonic free jets of Si(CH3)(4) and Si3H8
Ikoma Y, Endo T, Watanabe F, Motooka T
Journal of Vacuum Science & Technology A, 16(2), 763, 1998