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Lateral solid phase epitaxy of amorphously grown Si1-xGex layers on SiO2/Si(100) substrates using in-situ RPCVD postannealing Skibitzki O, Yamamoto Y, Schubert MA, Tillack B Thin Solid Films, 593, 91, 2015 |
2 |
Solid-phase epitaxy of undoped amorphous silicon by in-situ postannealing Skibitzki O, Yamamoto Y, Schubert MA, Tillack B Thin Solid Films, 520(8), 3271, 2012 |
3 |
Solid-phase epitaxy of amorphous silicon films by in situ postannealing using RPCVD Skibitzki O, Yamamoto Y, Schubert MA, Weidner G, Tillack B Solid-State Electronics, 60(1), 13, 2011 |
4 |
Fabrication of high-Ge-fraction strained Si1-xGex/Si hole resonant tunneling diode using low-temperature Si2H6 reaction for nanometer-order ultrathin Si barriers Takahashi K, Sakuraba M, Murota J Solid-State Electronics, 60(1), 112, 2011 |
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Improvement in photovoltaic conversion efficiency of InGaP solar cells grown on Si substrate by thermal cleaning using Si2H6 Goto S, Ueda T, Yamagishi C Solar Energy Materials and Solar Cells, 66(1-4), 631, 2001 |
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Dissociative adsorption of silane on the Si(100)-(2x1) surface Brown AR, Doren DJ Journal of Chemical Physics, 110(5), 2643, 1999 |
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Ge(001): B gas-source molecular beam epitaxy: B surface segregation, hydrogen desorption, and film growth kinetics Kim H, Greene JE Journal of Vacuum Science & Technology A, 17(2), 354, 1999 |
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Absorption spectroscopy of SiH2 near 640 nm Escribano R, Campargue A Journal of Chemical Physics, 108(15), 6249, 1998 |
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Photoinduced reaction of disilane with the Si(111) surface Batinica GJ, Crowell JE Journal of Physical Chemistry B, 102(21), 4135, 1998 |
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Epitaxial growth of 3C-SiC on Si(100) by pulsed supersonic free jets of Si(CH3)(4) and Si3H8 Ikoma Y, Endo T, Watanabe F, Motooka T Journal of Vacuum Science & Technology A, 16(2), 763, 1998 |