검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effects of Etch Products and Surface Oxidation on Profile Evolution During Electron-Cyclotron-Resonance Plasma-Etching of Poly-Si Tuda M, Ono K, Nishikawa K Journal of Vacuum Science & Technology B, 14(5), 3291, 1996 |
| No. | Article |
|---|---|
| 1 |
Effects of Etch Products and Surface Oxidation on Profile Evolution During Electron-Cyclotron-Resonance Plasma-Etching of Poly-Si Tuda M, Ono K, Nishikawa K Journal of Vacuum Science & Technology B, 14(5), 3291, 1996 |