검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
High-rate deposition of hydrogenated amorphous silicon films using inductively coupled silane plasma Sakikawa N, Shishida Y, Miyazaki S, Hirose M Solar Energy Materials and Solar Cells, 66(1-4), 337, 2001 |
| 2 |
Real-Time Process Sensing and Metrology in Amorphous and Selective-Area Silicon Plasma-Enhanced Chemical-Vapor-Deposition Using in-Situ Mass-Spectrometry Chowdhury AI, Read WW, Rubloff GW, Tedder LL, Parsons GN Journal of Vacuum Science & Technology B, 15(1), 127, 1997 |