검색결과 : 1건
No. | Article |
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1 |
Rapid Thermal N2O Oxynitride an Si(100) Lu ZH, Hussey RJ, Graham MJ, Cao R, Tay SP Journal of Vacuum Science & Technology B, 14(4), 2882, 1996 |
No. | Article |
---|---|
1 |
Rapid Thermal N2O Oxynitride an Si(100) Lu ZH, Hussey RJ, Graham MJ, Cao R, Tay SP Journal of Vacuum Science & Technology B, 14(4), 2882, 1996 |