검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Sheet-Shaped ECR Plasma Generation Using Permanent-Magnets for Material Processing Nakase K, Shibata T, Yasui T, Tahara H, Yoshikawa T Thin Solid Films, 281-282, 152, 1996 |
| No. | Article |
|---|---|
| 1 |
Sheet-Shaped ECR Plasma Generation Using Permanent-Magnets for Material Processing Nakase K, Shibata T, Yasui T, Tahara H, Yoshikawa T Thin Solid Films, 281-282, 152, 1996 |